hi siripon,

  There is a su-8 thinner that can thin su-8 down to any thickness you
want. you buy it from microchem and mix it with your su-8 by a certain
ratio, then it can be used.

 cheers

 Jiang Ziling

On 4/23/05, Siripon Sukuabol  wrote:
> Dear All,
> Please give me your advise and lab. experiment.
> What is the most minimum thickness that can get from SU-8 spin coating?
> Is it possible for SU-8 thickness of 0.3um?
>