Transene Inc has HF and non-HF versions of their Ti etch. Presumably the
non-HF version , which is HCl base, won't attack SiO2

-----Original Message-----
From: Ming Li [mailto:mlli@ucdavis.edu]
Subject: [mems-talk] Ti etchant not attack glass

Does any body know a Ti etchant and do not attack SiO2?