You can use a Ammonia and Hydrogen Peroxide solution.

Fraser
-----Message d'origine-----
De : Jauniskis, Linas [mailto:ljauniskis@foster-miller.com]
Objet : RE: [mems-talk] Ti etchant not attack glass

Transene Inc has HF and non-HF versions of their Ti etch. Presumably the
non-HF version , which is HCl base, won't attack SiO2