Hi,

There is a Swiss company called Gersteltec selling SU-8.
In their datasheet www.gersteltec.ch they propose to use a thin tip to open
the air bubbles and then allow for a long relaxation time up to a day for
the SU-8 to flow into the gaps produced.
I tried it and it worked for me.

Dominik Weiland


-----Original Message-----
From:  Jiang Ziling
Subject: [mems-talk] su-8 air bubble problem

  I am using Su-8 and frequently there are air bubbles left in the film
after spin coating. It is more serious with thicker films. I tried to get
rid of them by putting the pre-spinning resist-coated wafer in vacuum
dessicator, but the bubbles won't go. Anyone have experience in this?