durusmail: mems-talk: photoresist or polyimide sacrificial layer
photoresist or polyimide sacrificial layer
2005-05-03
photoresist or polyimide sacrificial layer
Rihui He
2005-05-03
Dear all,

I am planning to use AZ 4620 or AZ 4330 as sacrificial layer for my metal
device. Are they easy to reflow to form a round edge? Or I may get better result
by using polyimide?

Best regards,

Rihui He
rihui@seas.ucla.edu
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