Rihui, As far as the reflow property is concerned, they should have no problem. Bake in oven at 120C will probably reflow the surface better, then bake on hotplate to harden it. Or you can bake at 150C directly on hotplate. The problem is you need O2 plasma to ash it after the process. But if you use it for sacrificial layer, do you mean lift-off? May I ask why you want it rounded? You can reply me privately. Yours sincerely, Isaac Chan, Ph.D. University of Waterloo On Tue, 3 May 2005, Rihui He wrote: > I am planning to use AZ 4620 or AZ 4330 as sacrificial layer for my metal > device. Are they easy to reflow to form a round edge? Or I may get better > result by using polyimide?