Zhaoyan,

Have you tried using AZ developer? there's also a company called Clariant.
Best Regards

Tony

-----Original Message-----
From: Zhaoyang Fan 
Subject: [mems-talk] 319 developer while protecting Al

Hello,

We use Shipley 319 photoresist developer, while it attack the bottom Al metal
layer. Could you give me some advices how to overcome this problem? Any other
developers?