Hasan- I have 2 data points for PDMS tan Delta: Tan Delta = 0.03 below 100Hz, increasing to 0.2 at 10kHz Reference: Viscoelastic Solids, Roderic S. Lakes, CRC Press, New York, 1999 Not the value you are looking for, but maybe helpful. Tan Delta data can be quite hard to find for this material, good luck. Patrick Roman, M.S. Microsystems Engineer -----Original Message----- From: hsharifi@purdue.edu Subject: [mems-talk] PDMS loss tangent at very high frequency I was wondering if anybody knows the loss tangent of PDMS at very high frequency, 10GHz.