Nik Dee,
How are you using chlorobenzene? When I've used it, it has been after exposure
but before development. There is no exposed silicon at this part of the
photolitography (well, the edge and the backside are exposed, but there's no
pattern there).

So, my point is that perhaps more details will make it clearer what your
difficulty is.
Jesse Fowler



             Nik Dee 
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       Subject
                                                 Please respond to
[mems-talk] Silicon etching
                                  General MEMS discussion 









Hi guys, I have tried to use Chlorobenzene to liftoff S1813 on a silicon wafer.
It looks like there is some rection between the Chlorobenzene and the silicon
and the features of the S1813 are destroyed.
Does anyone know how to get around this?

Nik Dee

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