Nik,

I have always had good luck with 500A Cr and then Au.

Brent

Nik Dee wrote:

> I use Chlorobenzene (4-5 minutes) after S1813 exposure and before
> development
> just like you have suggested. It looks like the Chlorobenzene I used was
> contaminated because I repeated the experiment with a new batch of
> Chlorobenzene and it seemed ok.
> Another problem is that there is no good adhesion of gold (evaporated gold
> around 500 nm) on the silicon surface. maybe Titanium first?