u8612519@cc.NCTU.edu.tw wrote: > > Hello, > Recently,we will design an accelerometer.In our opinion , we > want to use the method of "capacitive detection" to sense its > G value. Does anyone know that if we want to sense the value correctly, > how about the range of capactiance value? > About pF(10^-12) or fF(10^-15) or others. > > Thank you very much!!!! > > sincerely, > ------------ > Yu-Chern Lin > Electrical and Control Eng. > National Chiao-Tung University,Taiwan > E-Mail:u8612519@cc.nctu.edu.tw > > > First of all, you need to determine whether bulk or surface micromachining will be used. Your will need to decide what the total capacitance will be and how much is the stray capacitance in your design. The last thing is to determine the capacitance that you want to have to maintain the performance requirement, ie full scale, overrange, linearity,etc. Gook Luck! Michael Young Advanced Custom Sensors, Inc. http://www.acsensor.com