hello all,

  In the next few days I will be trying to dilute Su-8 2025 with the
Su-8 2000 thinner, both supplied by Microchem.  I wish that at a
sufficient dilution ratio the spin-coated film thickness can be as
little as 200nm. I don't know if this is possible. I will calibrate
films of different thickness of AFM.  I hope this thin film can be
coated, patterned, hotbaked and used as a permanent passivation layer
to protect magnetic sensors from microfluidic liquid flow. The reason
why I try this is that it really takes trouble and time to find SiO2
deposition facilities in our lab. If anyone has experience of making
submicron Su-8 films, please leave valuable advice! Thanks a lot.

  cheers

  Jiang Ziling