Dear all

Does anyone have some experience in making SU8 structures on silicon
nitride membranes?

I am planning to make SU8 structures on 10-50 nm thick silicon nitride
membranes (below 20x20 microns large). The SU8 thickness should be
between 10 to 50 microns thick. The structures themselves are about 5
microns.

Some reference will be greatly appreciated!

Thanks!

Anpan