durusmail: mems-talk: Surface Stress & Cantilever
Dielectric fill material for deep trenches
2005-05-16
2005-05-17
Surface Stress & Cantilever
2005-05-17
2005-05-18
Surface Stress & Cantilever
Sudhanshu Garg
2005-05-17
Hi!

I am sure this group must be having people working on BioMEMS. I just
wanted to know if anyone here has come across an analytical model for
deflection of a cantilever with surface stress. I already have a paper
which gives experimental results on this, however, there is no analytical
model.

Let me know, whatever little help can be contributed.

Thanks,
SGarg

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