Chuan, If you need no oxidation at all, gold or platinum are your choice They need an adhesion layer You can use aluminum since the oxide formed is self limitting and very thin W might grow thick oxides Shay Original Message: ----------------- From: Tan, Chuan Seng Subject: [mems-talk] metal oxidation at 200C Does anyone know of any metal that can stand heating up to 200C in room ambient without servere oxidation ? It is ok to have an outer layer of oxide as long as the oxidation is self-limiting Any comments about Al or W ?