Hi, I don't know exactly the processes you described. But I know that PDMS will swell in acetone. It might caused by the mechanical strain between PDMS and your substrats. Xin Liu(Mr.) Dalian Institute of Chemical Physics, Chinese Academy of Sciences -----Original Message----- From: Yi Zhao [mailto:achelous@bu.edu] Subject: [mems-talk] PDMS adhesion I found in my experiments that acetone is good to release bonded PDMS surfaces. But I do not how it works. Does anyone have experience or can provide some references what exactly acetone does to the interfacial adhesion of PDMS?