Hi Brian,
   We e-beam Fe quite frequently and often have problems with the users
venting too soon afterwards, resulting in fractured graphite crucibles. However,
I think you don't have to be too concerned with oxide if you
"soak" the material before beginning the deposition. That is, run the
EBEAM supply up to about 75% of your deposition power and let it sit for about
1-2min with the shutter closed. That should remove the oxide.

-Mike Martin

>>> gabriel.matus@gmail.com 06/10/05 12:13 PM >>>

The standard pickling solution in the non MEMS world is 1 M HCl.  I
can't imagine your oxide is too thick so a few seconds should do the
trick.