Dear all:
Now I`m try to do some hydrophilic bonding.At first, Si wafers are cleaned by
standard RCA1.But even after treated by
HNO3+HF(65%HNO3:48%HF:H2O=5:100:0.001),Si wafers do not wettable.Is the recipe
right? Please help me!Thanks a lot.
Nielei