durusmail: mems-talk: how to process hydrophilic bonding?
how to process hydrophilic bonding?
2005-07-05
2005-07-06
2005-07-07
2005-07-08
how to process hydrophilic bonding?
NL
2005-07-05
Dear all:
   Now I`m try to do some hydrophilic bonding.At first, Si wafers are cleaned by
standard RCA1.But even after treated by
HNO3+HF(65%HNO3:48%HF:H2O=5:100:0.001),Si wafers do not wettable.Is the recipe
right? Please help me!Thanks a lot.
                                                       Nielei



reply