Um, out of curiosity, what is the HNA etch for? Doesn't that eat up
your surface and roughen it up?

Simon

On Jul 4, 2005, at 9:28 PM, NL wrote:

> Dear all:
>    Now I`m try to do some hydrophilic bonding.At first, Si wafers are
> cleaned by standard RCA1.But even after treated by
> HNO3+HF(65%HNO3:48%HF:H2O=5:100:0.001),Si wafers do not wettable.Is
> the recipe right? Please help me!Thanks a lot.
>                                                        Nielei