durusmail: mems-talk: RE: Au plating problem
RE: Au plating problem
2005-07-12
RE: Au plating problem
Serhan ARDANUC
2005-07-12
Hi Mehmet,

I use AZ4903 for solder electroplating solutions for similar amount of time
without any hardbake and trouble. I do not know how corrosive is the gold
bath but you can give it a try. I do it 30 micron thick and other people in
my group do it 60-70 micron thick with douple spin for nickel
electroplating.

Let me know if you are interested and need the details.

Good luck
Serhan Ardanuc



From: Mehmet Unlu 
Reply To: General MEMS discussion 
To: mems-talk@memsnet.org
Subject: [mems-talk] SPR 220-3 Au plating problem
Sent: Tuesday, July 12, 2005 1:23 PM
Hi everyone,
we are trying to replace SJR 5740 with SPR 220-3 for electroplating process.
However we observed that SPR220 can not withstand inside the cyanide gold
plating solution even for a hardbake temperature of 120 C for 12 hours.  For
SJR 5740, we managed to achieve very stable features for a plating duration
of 30 minutes. The hardbake temperature for SJR 5740 is 80 C for 12 hours.
Do you have any experience about the durability of SPR 220-3? Do you have
any alternatives to be used as mold photoresist for 30-40 minutes of gold
plating?
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