Dear Jeaneth, HF works well to remove oxide off your silicon, but a piranha etch really cleans (H2SO4 and H2O2 (warm)). Brent Jeaneth Corredor wrote: > I need to clean a silicon surface. I know that it > should be made with HF but I don't know the details of > the procedure of cleaning. > can some of you give me this information? thank you