Jeaneth, That is a very big subject.  Generally a process involving SC1 and
SC 2 followed by a rinse and then often a mechanical scrub using a nylon or
pva brush.  The HF will remove the oxide but then it is very difficult to
dry without spotting.  Depending upon how much material you need to clean
and the desired final surface, i.e. hydrophobic or hydrophilic will
determine what you need to do.

If you wish you can call and I will try to help

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640 phone
973-263-8888. fax

-----Original Message-----
From:   Jeaneth Corredor [SMTP:luidra@yahoo.com]
Subject: [mems-talk] clean a silicon surface

I need to clean a silicon surface.  I know that it
should be made with HF but I don't know the details of
the procedure of cleaning.
can some of you give me this information? thank you