durusmail: mems-talk: About the Piranha cleaning
About the Piranha cleaning
2005-07-14
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About the Piranha cleaning
Zhiwei Zou
2005-07-15
I am confused about the sequence of mixing these two chemicals. Some
materials said add H2O2 to H2SO4 but others do it reversely.
Who can help me to confirm it?

Thanks!

Sincerely,
Zhiwei Zou

-----Original Message-----
From: Hongjun-ECE
Subject: RE: [mems-talk] About the Piranha cleaning

Please confirm that it is H2So4 added to H2O2, instead of H2O2 added to
H2So4, which might be dangerous.

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