Always add 1 part H2O2 to 3 parts H2SO4. Barry Isenor System Integration Electrical and Computer Engineering University of Calgary -----Original Message----- From: Hongjun-ECE [mailto:hzeng@ece.uic.edu] Subject: RE: [mems-talk] About the Piranha cleaning Belford, Please confirm that it is H2So4 added to H2O2, instead of H2O2 added to H2So4, which might be dangerous.