durusmail: mems-talk: About the Piranha cleaning
About the Piranha cleaning
2005-07-14
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2005-07-15
About the Piranha cleaning
Barry Isenor
2005-07-15
Always add 1 part H2O2 to 3 parts H2SO4.

Barry Isenor
System Integration
Electrical and Computer Engineering
University of Calgary


-----Original Message-----
From: Hongjun-ECE [mailto:hzeng@ece.uic.edu]
Subject: RE: [mems-talk] About the Piranha cleaning

Belford,

Please confirm that it is H2So4 added to H2O2, instead of H2O2 added to
H2So4, which might be dangerous.

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