Hi, It is definitely add the acid to H2O2. In Portuguese there is an easy way to remember: H2O2 and water are feminine nouns in Portuguese, so we always have to remember: ladies first :) Virginia Soares INESC-MN Rua Alves Redol,9 1000-029 LISBOA PORTUGAL www.inesc-mn.pt -----Original Message----- From: Zhiwei Zou [mailto:zouz@email.uc.edu] Subject: RE: [mems-talk] About the Piranha cleaning I am confused about the sequence of mixing these two chemicals. Some materials said add H2O2 to H2SO4 but others do it reversely. Who can help me to confirm it?