Hi Yu,

You can strip your APTS or MPTS from silicon using oxygen plasma or UV ozone
treatment. SAM (self-assembled monolayer) coatings are quite stable against
solvents, so acetone will not work.

Contact me if you have any questions.

Regards,

Boris Kobrin, Ph.D.
Director of Technology
Applied MicroStructures, Inc.
4425 Fortran Drive
San Jose, CA 95134
(408) 594-0654


Message: 4
Date: Mon, 18 Jul 2005 08:37:54 -0400
From: cyyfq@bu.edu
Subject: [mems-talk]

To: mems-talk@memsnet.org
Message-ID: <1121690274.42dba2a242dd5@www.bu.edu>
Content-Type: text/plain; charset=ISO-8859-1

dear all:

how can I clean the silicon surface after functionalized by silane like
APTES or
MPTS? does acetone work?

best

Yu Chen