Greetings,
we use an ion assisted microblatsing technology for glass. (Bio medical
devices)Our features are about 8/10 micron holes. we also do holes through
glass with other proprietary processes 25 micron up.
To make a long story short I am curious sand blasting what is the smallest
features you can attain..
 are you using SU as a mask? to protect the glass you don't want to etch so
to say
regards
Walter
www.elume.com

-----Original Message-----
From: Avinash Kane [mailto:kane21@llnl.gov]
Subject: [mems-talk] Cleaning Microfluidic Devices (SU8-2000) on Glass

Hello,

I am currently fabricating microfluidic devices in SU8-2000 (on glass
substrates).
I am creating through-holes in my glass substrates by sandblasting (a very
dirty process).
I am interested in knowing how other users are cleaning their devices after
fabrication.

I am not currently hardbaking my wafers because I intend to use SU8 as an
adhesive bonding layer to seal the devices (requires partial cross-linking
of SU8).
The use of fresh Pirhana (3:1 Sulfuric Acid : Peroxide) completely strips
my wafers of SU8.

I'm wondering if there are chemicals /other physical processes that can
aggressively clean my wafers
without harming my SU8 patterns.

I have also tried ultrasonic agitation, but it tends to peel off smaller
SU8 features.