durusmail: mems-talk: RE: SiNx dry etch
SiNx dry etch
RE: SiNx dry etch
Diaphragms
2005-07-28
2005-07-29
2005-07-30
RE: SiNx dry etch
Tripp, Marie Kathleen
2005-07-22
Hi Bill,  Cl2 + Ar will work... But depending on why you are trying to avoid F,
Cl may be worse...  -Marie

reply