durusmail: mems-talk: high melting-point wax used in KOH etch
high melting-point wax used in KOH etch
2005-07-22
2005-07-22
high melting-point wax used in KOH etch
D. Zhou
2005-07-22
Dear all,

Does anyone know where I can get some high melting-point wax which can be
used to protect the device side of the chip when doing KOH etch at 80
degrees to remove the substrate ? Many thanks.



--
Daxiang Zhou
PhD candidate
Semiconductor Physics Group
Cavendish Laboratory
University of Cambridge
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