durusmail: mems-talk: 5214E resist
5214E resist
2005-07-24
2005-07-25
2005-07-25
5214E resist
Jesse D Fowler
2005-07-25
Hi Krishna,
THat looks similar to my image-reversal process, except I use AZ 400K 1:5 for
developing. The image-reversed resist seems more fragile. However, I have only
used image reversal to convert an etch mask to a lift-off mask, so I did not
evaluate the quality
of the edges.
Jesse Fowler

reply