A thought on photoresist storage:
We buy AZ5214E in miniumum quantity which for us is several
years worth.  We therefore keep the resist in the
refrigerator, except for a small (50 mL) quantity which is
kept out for everyday use.  Just remember, when refilling the
small quantity, leave the large quantity out at room
temperature to allow it to warm up to room temperature before
opening it.  Otherwise you will have wator vapor from the air
condensing into the resist.


>From: "Kasman , Elina" 
>Subject: RE: [mems-talk] 5214E resist
>To: "General MEMS discussion" 
>
>Has the resist been opened for longer than a year? If yes, I
would say
>it is probably due to excess water absorbed from the air in
the resist.