durusmail: mems-talk: photopatternable PDMS (Dow Corning 5150 or 5351) - bonding to itself or other PDMS
photopatternable PDMS (Dow Corning 5150 or 5351) - bonding to itself or other PDMS
2005-07-25
photopatternable PDMS (Dow Corning 5150 or 5351) - bonding to itself or other PDMS
jet
2005-07-25
Does anybody out there have experience using photopatternable PDMS
(such as WL-5150 or WL-5351) and had any success bonding it to other
PDMS?  I've tried the plasma treating procedure that works with
Sylgard 184, but it doesn't work with this stuff.  I'm spinning on a
layer about 30 microns, patterning it, and need to bond it to another
layer of PDMS (or anything else that can serve as a thin membrane
above the patterned layer and has a low modulus.)
Thanks,
Joseph Peach
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