[mems-talk] PDMS bonds to silicion wafer?

Black spots on PDMS!!!

2005-07-19

Vishwanath Somashekar

Re: Black spots on PDMS!!!

2005-07-22

Marc Hennemeyer

PDMS bonds to silicion wafer?

2005-07-27

csh@u.washington.edu

2005-07-28

Cheng Ming Lin

PDMS bonds to silicion wafer?

csh@u.washington.edu

2005-07-27

Hello all,


Recently people are discussing about bonding between PDMS and glass and bonding
between PDMS and PDMS.
I am wondering anyone has experience of bonding between cured PDMS and silicon?
Thanks,


chengsheng