durusmail: mems-talk: RE: Diaphagms
RE: Diaphagms
2005-07-29
RE: Diaphagms
John Maloney
2005-07-29
> I deparately need the book of " Flat and corrugated Diaphragm
> design Handbook" by M. D Giovanni, Mercel Dekker(publisher)
>
> In case the book is available in your library , please let me know.
>
> If any one of you can suggest me any other reference which
> deals with te same subject, I shall be indebted. I am
> specifically looking for the design book that deals with
> deflection equation of the diaphragms of different shapes.
> The "Theory of plates and shells" by timoshenko does deal
> with plates but not exactly with diaphargms.
>
> Can the expression for strain energy for large deflection
> with residual stress be solved with Matlab, if yes  can
> anyone tell which method to be used.

This issue is handled in van Rijn et al, "Deflection and maximum load of
microfiltration membrane sieves made with silicon micromachining," J
MEMS, 6(1), 1997.  They address rectangular and square membranes with
residual tensile stress undergoing large deflections.

Because the incorporation of large deflections makes the problem
nonlinear, a number of assumptions need to be made to extract a simple
equation of deflection.  Different authors have obtained slightly
different solutions, and analysis of the problem from strain energy
principles can be very time-consuming.  If you are modeling a
microfabricated device, it may be easier to use FEM to generate
numerical solutions.

I agree with Shay Kaplan's earlier comment: Timoshenko does deal with
diaphragms, in Chapter 9 of "Theory of plates and shells."  Large
displacements in plates = strain in the middle plane = diaphragm
effects.

Also, Giovanni's book is available in MIT's library (libraries.mit.edu).

Good luck,
John Maloney
MicroCHIPS, Inc.
www.mchips.com

reply