durusmail: mems-talk: Diaphragms
SiNx dry etch
RE: SiNx dry etch
Diaphragms
2005-07-28
2005-07-29
2005-07-30
Diaphragms
anurekha
2005-07-30
dear Kaplan,

thanks for the reply, the paper that I am referring to follows the book of
giovanni as the reference and I have seen that the solutions are slightly
different from that given in giovanni

thank for replying
anurekha
----- Original Message -----
From: "shay kaplan" 
To: "'General MEMS discussion'" 
Sent: Friday, July 29, 2005 6:03 PM
Subject: RE: [mems-talk] Diaphragms

> Dear anurekha,
> Most of what you will be doing in mems - unless it's PDMS falls between
> either a plate or a shell - the Timoshenko bible still holds
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