durusmail: mems-talk: Coating of Poly Si with a Ferromag Matl !!!!
Pyrex wafer anodically bonded to Thin Silicon Problem
2005-08-01
Zoberbier, Margarete
2005-08-01
Tony Rogers
Coating of Poly Si with a Ferromag Matl !!!!
2005-08-01
Namit Singh
How to etch Silicon into oblique walls using ICP?
2005-08-01
ning
2005-08-01
Hongjun-ECE
2005-08-02
ning
2005-08-03
David Nemeth
Coating of Poly Si with a Ferromag Matl !!!!
Namit Singh
2005-08-01
Hi,
I need to coat a beam of Poly Si (450x25x2.5 um) with
a ferromagnetic material of thickness around
1-2um.What is the best method of doing it and can
anyone suggest a specific material for it?
Thank you in anticipation!
Sincerely,
Namit.
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