Greetings,
I would spin coat a Polyimide film using a releasing agent. I believe this
to be the only way I know to get below 100 nm
Regards
walter
www.elume.com

-----Original Message-----
From: Huisheng jiao [mailto:huisheng.jiao@gmail.com]
Sent: Monday, August 01, 2005 8:40 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] thin polyimide film

Hi, I am looking for ultrathin polyimide film for my research. the
thickness is better below 100nm. does anybody have any idea where to
get a small piece? is it commercially available? Many thanks, Huisheng
JIAO
huisheng.jiao@gmail.com