durusmail: mems-talk: Photoresist for Lift-off process
Photoresist for Lift-off process
2005-08-02
2005-08-03
2005-08-05
2005-08-08
KOH Wet Etching of Si wafers
2005-08-09
2005-08-10
2005-08-12
2005-08-09
2005-08-11
Photoresist for Lift-off process
Richard Chang
2005-08-02
Hi, All,

  Does anybody know what the photoresist are for lift-off process other than
Futurrex NR7-1500PY?
  I need to use lift-off process to pattern the sputtering silicon dioixde
layer. But I don't have NR7-1500 PY.
  Could I use two different photoresists, just normal positive photoresists, to
do the lift-off? I have S1813, AZP 4620, and AZP 4210.
  Is there guidance I should follow?
  Thanks.

Richard Chang
reply