durusmail: mems-talk: any special trick for taking SEM of PDMS
any special trick for taking SEM of PDMS
2005-08-04
2005-08-16
2005-08-16
2005-08-17
any special trick for taking SEM of PDMS
csh@u.washington.edu
2005-08-03
Hello,

I'm having difficulty taking SEM for PDMS.
I coat a thin layer of gold about 150A on PDMS.
However the SEM resolution is so low for some reason.
I took the SEM for the master, which is photoresist. I can see 0.25um feature.
However for PDMS, the image is blur even for 10um feature.
I am just wondering if I miss something. Or it just hard to see PDMS.
Thanks,

Jason


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