it's hard to see PDMS.. as a matter of fact on all dielectric material.. On Wed, 3 Aug 2005 csh@u.washington.edu wrote: > Hello, > > I'm having difficulty taking SEM for PDMS. > I coat a thin layer of gold about 150A on PDMS. > However the SEM resolution is so low for some reason. I took the SEM for the > master, which is photoresist. I can see 0.25um feature. However for PDMS, the > image is blur even for 10um feature. I am just wondering if I miss something. > Or it just hard to see PDMS.