Hello Eric, normally for (quasy)unknown RI will be good following procedures: - prism coupler (for thick films and substrates with lower RI as your diamond film) - (spectroscopic)ellipsometry (for thin films and substrates with known RI). To simplify your analysis with this procedures you need to know the thickness of your films. I used for prism coupler the 'metricon 2010' from atos GmbH and for ellipsometery the 'Sentech Senduro' from Orbis Technologies Ltd. Best regards, Vitali Emelianov -----Ursprüngliche Nachricht----- Von: Eric J. Correa Gesendet: Thursday, August 04, 2005 22:10 An: mems-talk@memsnet.org Betreff: [mems-talk] Question About Index of Refraction Hello Everyone: I am trying to perform characterization on diamond films in terms of thickness and I having some issues measuring the thickness of the films across the wafer. The main problem that I am having is that I do not know the index of refraction of the diamond film. I was wondering if someone knows about any method or company able to measure the value of n for a specific material. So far, I have tried the elipsometer but since I do not know the thickness and neither the index of refraction I am having wrong measurements. I will appreciate any idea or suggestion.