Hi Aniruddh,

I have done this using an e-beam evaporator. Depending on accelerating
voltage there will be some radiation, but in my case not enough to
expose the SU8. The problem I found with this is that during the post
exposure bake the SU8 will shrink, buckling your film on top.

Jobert van Eisden
SUNY Albany

-----Original Message-----
From: Aniruddh Sarkar
Subject: [mems-talk] Metal deposition on unexposed SU-8

I am looking for a way to deposit a thin metal film on unexposed SU-8
without exposing it in the process.

PVD sources seem to generate enough light to expose it, while in most
kinds of sputtering too there seem to be enough UV as well as high
energy particles around.

I have been considering electroless deposition but don't know how to
activate the surface.