Agree with Roger Shile. Use 100W and 30mtorr as a reference.  If you want it
be extremely vertical, Bosch process is recommended.

Good luck,

Hongjun Zeng
MEMS/Nano Scientist
Microfabrication Application Laboratory
University of Illinois at Chicago

-----Original Message-----
From: baobao
Subject: [mems-talk] Any good recipe for Si etch in ICP?

I am trying to do some Si etch. I use SF6 and Ar.
I hope to get straight side wall that is around 1 micro deep. But when I
cleave and look it using SEM, there are some undercut and the side looks
like wet etch.

i am not sure if anyone can give me some idea about the recipe that i could
use.