Hi prem,
         May i know for what application u r using the
cantilever beams? Do you have a fab lab in iitd?

hitesh


--- Prem  Pal  wrote:

> Dear Researchers
>
> I wish to use LPCVD polysilicon for piezoresistors
> on silicon nitride or silicon dioxide cantilever
> beams. I wish to know the optimum thickness and
> doping concetration for high piezoresistivity. For
> my work, I want to use polysilicon thickness as
> minimum as possible which can effectively work for
> high piezoresistivity.
> Any kind of suggestion regarding this matter would
> be highly appreciated.
> Thanx in advance.