durusmail: mems-talk: Metal deposition on unexposed SU-8
Metal deposition on unexposed SU-8
2005-08-08
2005-08-09
2005-08-08
Metal deposition on unexposed SU-8
Peter Svasek
2005-08-09
Hallo Aniruddh,

I deposit Ag on expposed and PEB'd, but undeveloped SU-8 structures by
thermal evaporation.
For evaporation of Ag  you need relatively low temperatures (below 1000
deg C), so
the unexposed SU-8 is not exposed during the deposition.  We deposit
layers up to 2 micrometers.
For subsequent temperature steps we avoid temperatures higher than 60
deg C to avoid wrinkling of the
SU-8 (and the metal layer) in the unexposed areas, as long as the
unexposed SU-8 is not removed by developing..

Hopefully this will help you

Best regarde
Peter Svasek

--
Vienna University of Technology
Institute of Sensor and Actuator Systems
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