Yes I'm sure.
I sputtered the structures with gold and after lift off on one sample a
few structures were only half developed. So I could clearly see the
cross-section.
I also made some structures changing the z-position of the sample while
illuminating. This gave the same cross-section. So I think it is not a
problem of focussing. I also saw the small structures in SEM before the
lift-off.

Regards
Sven

> -----Ursprüngliche Nachricht-----
> Von: Guillermo Villanueva
> Gesendet: Donnerstag, 11. August 2005 10:46
> An: General MEMS discussion
> Betreff: Re: [mems-talk] Lift-Off-Process question
>
> I'm not sure I totally understood you, but just to be sure:
> Have you taken into account that when making photolithography
> on glass it is
> very difficult to assure if you are well focussed on the
> surface or not?
>
> We had some problems with that in our center and we finally
> gave up trying
> to obtain very small features.