Hi, I can't remember the exact name of the material, but I took SEM pictures of PDMS, successfully, after painting the surface of PDMS. It was silver based painting material. The supporting engineer painted the surface of PDMS with brush, and then dried up for one day. Around 20 micron x 25 micron of columnar structures were clearly shown. Sorry for insufficient information, but I think it was normally used solution. I think you can get some information from manufacturer of SEM. Sincerely. WJ -----Original Message----- From: abong [mailto:abong@u.washington.edu] Sent: Friday, August 05, 2005 8:24 AM To: General MEMS discussion Subject: Re: [mems-talk] any special trick for taking SEM of PDMS it's hard to see PDMS.. as a matter of fact on all dielectric material..