durusmail: mems-talk: any special trick for taking SEM of PDMS
any special trick for taking SEM of PDMS
2005-08-04
2005-08-16
2005-08-16
2005-08-17
any special trick for taking SEM of PDMS
Cristi Lepadatu
2005-08-16
Hello,

You could try to evaporate maximum 2 nm of gold over your structures
in rotational mode. Fixed mode (for lift off) may work as well if you
don't want to tilt your specimen. Less than2 nm of gold should be
transparent to electron beam and shouldn't form crstals.

Make sure you have a good contact between your sample and the SEM
stage in order to dissipate the charges.

Good luck

Tell us what did you get

Cristian

On 8/16/05, Woo-Jin Chang  wrote:
> Hi,
>
> I can't remember the exact name of the material, but I took SEM pictures of
> PDMS, successfully, after painting the surface of PDMS. It was  silver based
> painting material. The supporting engineer painted the surface of PDMS with
> brush, and then dried up for one day. Around 20 micron x 25 micron of
> columnar structures were clearly shown.
>
> Sorry for insufficient information, but I think it was normally used
> solution. I think you can get some information from manufacturer of SEM.
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