durusmail: mems-talk: Stresses of SiO2 and Si3N4
Stresses of SiO2 and Si3N4
2005-08-20
2005-08-22
patterned nano dots
2005-08-23
Stresses of SiO2 and Si3N4
Kavin
2005-08-20
Hello everyone,

I am wondering whether anyone of you can inform me
some data or reference on stresses of SiO2 deposited
on poly-Si and Si3N4 deposited on SiO2?

Thanks in advance.

Kavin Zhan
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