In my experience, MIF 319 etched aluminum very fast. I used to use MIF 319 to remove LOR-5B after lifting off Al with Acetone (using bilayer). It etched the Al very rapidly. -Bill -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Steven McMaster Sent: Tuesday, August 23, 2005 9:23 AM To: 'General MEMS discussion' Subject: RE: [mems-talk] Problems with lift-off using S1813 photoresist You can use MIF 319 to develop out the S1813 and LORXXB. So I recommend still using the bi layer method. Steven McMaster Engineer